Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography
نویسندگان
چکیده
منابع مشابه
Patterning Sub-30-nm MOSFET Gate with -Line Lithography
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2016
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4965840